A versatile nanopatterning technique based on controlled undercutting and liftoff.

نویسندگان

  • Mark C Rosamond
  • Andrew J Gallant
  • Michael C Petty
  • Oleg Kolosov
  • Dagou A Zeze
چکیده

Nanopatterning techniques have applications across a wide range of experimental sciences, from controlling cell growth and function [ 1 ] to improving the effi ciency of thin fi lm solar cells. [ 2 ] Approaches developed by the microelectronics industry such as photon-, ionand electron-beam lithography are highly refi ned, producing features with dimensions of just tens of nanometers. Unfortunately, the cost of these methods prohibits access to many in the scientifi c community. As a result, the last two decades has seen an exponential increase in publications on unconventional nano-patterning techniques [ 3 ] which provide cheaper, but restricted ways of fabricating nanostructures. These include soft, [ 4 ] nano-imprint, [ 5 ] block copolymer, [ 6 ] and scanning probe [ 7 ] lithography. Here, we report on a new edgebased technique that extends a controlled undercutting method, fi rst proposed by Love et al. [ 8 ]

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors

Cryogenic etching of silicon, using an inductively coupled plasma reactive ion etcher ICP-RIE , has extraordinary properties which can lead to unique structures difficult to achieve using other etching methods. In this work, the authors demonstrate the application of ICP-RIE techniques which capitalize on the cryogenic properties to create different sensors geometries: optical, electrical, magn...

متن کامل

Site-specific nanopatterning of functional metallic and molecular arbitrary features in nanofluidic channels.

We established a versatile method for site-specific nanopatterning of functional metallic and molecular arbitrary features in glass nanofluidic channels, with well-controlled feature sizes ranging from tens to hundreds of nanometers and precisely controlled placements in the range of several tens of nanometers. With the method, we achieved the fabrication of quasi-0D, quasi-1D, 2D, and 3D gold ...

متن کامل

One-step nanopatterning of conjugated polymers by electron-beam-assisted electropolymerization

We propose a one-step nanopatterning method where liquid monomers are polymerized directly with an electron beam under an atmospheric pressure. The method allows precise positional control of an electron beam that induces electropolymerization based on an anodic oxidation only in the irradiated areas. Various versatile conjugated polymers, including polypyrrole, polyaniline and poly(3-hexylthio...

متن کامل

Topography-controlled alignment of DNA origami nanotubes on nanopatterned surfaces.

The controlled positioning of DNA nanostructures on technologically relevant surfaces represents a major goal along the route toward the full-scale integration of DNA-based materials into nanoelectronic and sensor devices. Previous attempts to arrange DNA nanostructures into defined arrays mostly relied on top-down lithographic patterning techniques combined with chemical surface functionalizat...

متن کامل

Physical modelling of caving propagation process and damage profile ahead of the cave-back

The cavability assessment of rock mass cavability and indicating the damage profile ahead of a cave-back is of great importance in the evaluation of a caving mine operation, which can influence all aspects of the mine operation. Due to the lack of access to the caved zones, our current knowledge about the damage profile in caved zones is very limited. Among the different approaches available, p...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:
  • Advanced materials

دوره 23 43  شماره 

صفحات  -

تاریخ انتشار 2011